Enhanced THz transmission apertures through sub-wavelength annular apertures
(2006)
Journal Article
Gallant, A., Levitt, J., Kaliteevski, M., Wood, D., Petty, M., Abram, R., …Chamberlain, J. (2006). Enhanced THz transmission apertures through sub-wavelength annular apertures. Proceedings of SPIE, 6323, https://doi.org/10.1117/12.680552
We report on the development of a surface micromachined process for the fabrication of coaxial apertures surrounded by periodic grooves. The process uses a combination of copper electroforming and the negative epoxy based resist, SU8, as a thin flexi... Read More about Enhanced THz transmission apertures through sub-wavelength annular apertures.