Short Channel Effect of Solution-Processed ZnO Thin Film Transistors: Optimization for Photolithographic Process
(2018)
Journal Article
Jeong, Y., Lee, H., Pearson, C., & Petty, M. (2018). Short Channel Effect of Solution-Processed ZnO Thin Film Transistors: Optimization for Photolithographic Process. Nanoscience and Nanotechnology Letters, 10(5-6), 754-760. https://doi.org/10.1166/nnl.2018.2717
A photolithographic process for the fabrication of short channel solution-processed zinc oxide transistors (ZnO TFTs) was optimized. To avoid damage to the ZnO film by the photolithography, a bottom gate, bottom contact (BG-BC) device structure was a... Read More about Short Channel Effect of Solution-Processed ZnO Thin Film Transistors: Optimization for Photolithographic Process.