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Control and mass selection of CnHm+ fragments in an inductively coupledpulsed plasma

Zeze, DA; Joyce, AM; Anderson, CA; Brown, NMD

Authors

AM Joyce

CA Anderson

NMD Brown



Citation

Zeze, D., Joyce, A., Anderson, C., & Brown, N. (2002). Control and mass selection of CnHm+ fragments in an inductively coupledpulsed plasma. Applied Physics Letters, 80(1), 22-24

Journal Article Type Article
Publication Date 2002-01
Journal Applied Physics Letters
Print ISSN 0003-6951
Publisher American Institute of Physics
Peer Reviewed Peer Reviewed
Volume 80
Issue 1
Pages 22-24
Keywords CLUSTER BEAM DEPOSITION; CARBON NITRIDE FILMS; ELECTRON; IONIZATION