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Outputs (5)

Photolithographic Patterning of Bi-Helical Tracks onto Conical Substrates (2007)
Journal Article
Purvis, A., McWilliam, R., Johnson, S., Seed, N., Williams, G., Maiden, A., & Ivey, P. (2007). Photolithographic Patterning of Bi-Helical Tracks onto Conical Substrates. Journal of Micro/Nanopatterning, Materials, and Metrology, 6(4), https://doi.org/10.1117/1.2824377

We demonstrate the direct photolithographic patterning of a grossly non-planar substrate by creating 62 micron helical tracks on a 22 mm high cone. The projection of focused light on to the three dimensional surface is achieved using a computer gener... Read More about Photolithographic Patterning of Bi-Helical Tracks onto Conical Substrates.

Non-Planar Photolithography Using Digital Holograms (2006)
Presentation / Conference Contribution
McWilliam, R., Purvis, A., Johnson, S., Maiden, A., Williams, G., Seed, L., & Ivey, P. (2006, October). Non-Planar Photolithography Using Digital Holograms. Presented at Frontiers in Optics 2006 : Laser Science XXII, Rochester, New York

A photolithographic process using digital holograms enables the fine-pitch patterning of grossly non-planar substrates, with many potential applications in microelectronics packaging. Considerations of hologram design, fabrication and verification pa... Read More about Non-Planar Photolithography Using Digital Holograms.

Photolithography on Three Dimensional Substrates (2006)
Presentation / Conference Contribution
Ivey, P., McWilliam, R., Maiden, A., Williams, G., Purvis, A., & Seed, N. (2023, May). Photolithography on Three Dimensional Substrates. Presented at 56th Electronic Components and Technology Conference (ECTC 2006), San Diego, California

Photolithography is the primary technique for patterning planar substrates. However, some higher-density packaging solutions require fine features to be patterned onto grossly non-planar substrates, for example, in mechanical, optical and fluidic mic... Read More about Photolithography on Three Dimensional Substrates.

Nonplanar photolithography with computer-generated holograms (2005)
Journal Article
Maiden, A., McWilliam, R., Purvis, A., Johnson, S., Williams, G., Seed, N., & Ivey, P. (2005). Nonplanar photolithography with computer-generated holograms. Optics Letters, 30(11), 1300-1302. https://doi.org/10.1364/ol.30.001300

We outline a method for accomplishing photolithography on grossly nonplanar substrates. First we compute an approximation of the diffraction pattern that will produce the desired light-intensity distribution on the substrate to be patterned. This pat... Read More about Nonplanar photolithography with computer-generated holograms.