Outputs (6)

Holographic Lithography (2014)
Presentation / Conference Contribution
Purvis, A., Toriz-Garcia, H., Cowling, J., Williams, G., Seed, N., McWilliam, R., Soulard, F., & Ivey, P. (2014, July). Holographic Lithography. Presented at Imaging and Applied Optics 2014., Seattle, Washington, United States

This review summarises the work of the Durham-Sheffield, UK team working on Holographic Lithography over the last decade. It collates progress in 3D resolution and overall scale of the substrate wiring patterns designed and considers a range of appro... Read More about Holographic Lithography.

Fabrication of a 3D electrically small antenna using holographic photolithography (2013)
Journal Article
Toriz-Garcia, J., Cowling, J., Williams, G., Bai, Q., Seed, N., Tennant, A., …Ivey, P. (2013). Fabrication of a 3D electrically small antenna using holographic photolithography. Journal of Micromechanics and Microengineering, 23(5), Article 055010. https://doi.org/10.1088/0960-1317/23/5/055010

We describe the novel fabrication of a 3D electrical small antenna and its subsequent characterization. The patterning of meander lines conformed onto a hemispherical substrate is achieved by 3D holographic photolithography, which uses time-division... Read More about Fabrication of a 3D electrically small antenna using holographic photolithography.

Fabricating non-planar antenna structures by a novel 3-D holographic photolithography method (2011)
Presentation / Conference Contribution
Soulard, F., McWilliam, R., Williams, G., Toriz-Garcia, J., Purvis, A., & Seed, N. (2011, December). Fabricating non-planar antenna structures by a novel 3-D holographic photolithography method. Presented at Second UK URSI Festival of Radio Science, University of Leicester, UK

Holographic recording of vertical surfaces (2011)
Presentation / Conference Contribution
Soulard, F., McWilliam, R., Cowling, J., Purvis, A., Williams, G., Seed, N., Toriz-Garcia, J., & Ivey, P. (2011, December). Holographic recording of vertical surfaces. Presented at Digital Holography and Three-Dimensional Imaging (DH), Tokyo, Japan

Vertical tracks on the sidewall of a silicon die using 3D holographic photolithography (2011)
Journal Article
Toriz-Garcia, J., Williams, G., McWilliam, R., Seed, N., Purvis, A., Soulard, F., …Ivey, P. (2011). Vertical tracks on the sidewall of a silicon die using 3D holographic photolithography. Journal of Micromechanics and Microengineering, 21(8), Article 085034. https://doi.org/10.1088/0960-1317/21/8/085034

We describe the patterning of multiple 10 µm wide conductive tracks down the vertical sidewall of a 500 µm thick silicon die. A novel photolithographic technique is used, which utilizes a computer-generated hologram mask in conjunction with a diffrac... Read More about Vertical tracks on the sidewall of a silicon die using 3D holographic photolithography.

Three-dimensional holographic lithography by an iterative algorithm (2011)
Journal Article
Cowling, J., Williams, G., Purvis, A., McWilliam, R., Toriz-Garcia, J., Seed, N., …Ivey, P. (2011). Three-dimensional holographic lithography by an iterative algorithm. Optics Letters, 36(13), 2495-2497. https://doi.org/10.1364/ol.36.002495

We have applied an iterative algorithm for hologram design with multiple output image planes arranged in close proximity to create continuous patterns within an imaging volume. These holograms have been designed for photolithography on three-dimensio... Read More about Three-dimensional holographic lithography by an iterative algorithm.