Skip to main content

Research Repository

Advanced Search

Electron-stimulated reaction of C₆₀ with a model etching gas, SF₆

Coquel, Jean-Marc; Hunt, Michael R.C.; Siller, Lidija; Palmer, ,; Richard, E.

Authors

Jean-Marc Coquel

Lidija Siller

, Palmer

E. Richard



Citation

Coquel, J., Hunt, M. R., Siller, L., Palmer, ,., & Richard, E. (1998). Electron-stimulated reaction of C₆₀ with a model etching gas, SF₆. Journal of Applied Physics, 84, 4603-4610

Journal Article Type Article
Publication Date 1998
Journal Journal of Applied Physics
Print ISSN 0021-8979
Publisher American Institute of Physics
Volume 84
Pages 4603-4610
Publisher URL http://adsabs.harvard.edu/cgi-bin/nph-bib_query?bibcode=1998JAP....84.4603C&db_key=PHY