Fabrication of an in-plane SU-8 cantilever with integrated strain gauge for wall shear stress measurements in fluid flows

Allen, N.J.; Wood, D.; Rosamond, M.C.; Sims-Williams, D.B.; Brugger, J.; Briand, D.

Abstract

We present a cantilever fabricated from the polymer SU-8 for the measurement of wall shear stress in fluid flows. The pressure induced deflection of the cantilever, measured using a calibrated and integrated nichrome strain gauge, can be related to the wall shear stress on the surface. The initial degree of curvature of the cantilever can be controlled via the exposure dose, which allows a small positive deflection to be achieved, and so minimises the intrusion into the flow. Wind tunnel testing results show a sensitivity greater than 2.5 mV/Pa, with a shear stress of 0.38 Pa and excitation of 1 V.

Citation

Allen, N., Wood, D., Rosamond, M., Sims-Williams, D., Brugger, J., & Briand, D. (2009). Fabrication of an in-plane SU-8 cantilever with integrated strain gauge for wall shear stress measurements in fluid flows. In Proceedings of the Eurosensors XXIII conference (923-926). https://doi.org/10.1016/j.proche.2009.07.230

• Conference Name: Eurosensors XXIII conference
• Conference Location: Lausanne, Switzerland
• Online Publication Date: Sep 4, 2009
• Publication Date: Sep 4, 2009
• Deposit Date: Oct 1, 2010
• Publicly Available Date: Apr 30, 2015
• Volume: 1
• Pages: 923-926
• Series Title: Procedia chemistry
• Series Number: 1
• Series ISSN: 1876-6196
• Book Title: Proceedings of the Eurosensors XXIII conference.
• DOI: https://doi.org/10.1016/j.proche.2009.07.230
• Keywords: Strain gauge, SU-8, Shear stress, Cantilever.